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Amplified nanopatterning by self-organized shadow mask ion lithography
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10.1063/1.3473770
/content/aip/journal/apl/97/5/10.1063/1.3473770
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/5/10.1063/1.3473770
/content/aip/journal/apl/97/5/10.1063/1.3473770
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/content/aip/journal/apl/97/5/10.1063/1.3473770
2010-08-02
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Amplified nanopatterning by self-organized shadow mask ion lithography
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/5/10.1063/1.3473770
10.1063/1.3473770
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