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Schematic diagram of the experimental setup.
Dependences of the ion current to the target on the ICP electrode potential for different extraction grids: perforated metal sheet (a) and woven [(b) and (c)]; (d) IEDF for the woven grid with and . The ion current density was in all the cases.
Ion extraction from plasma: (a) plasma penetration through the grid cells; (b) ion beam formation.
Depth of the cylindrical and plane space charge sheaths. Dependences were obtained for the wire grid with and . The ion current density is .
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