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Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor
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View: Figures


Image of FIG. 1.
FIG. 1.

(a) THz-TDS setup with the beam waist centered between the two parabolic mirrors. A film sample is placed in a single-pass transmission geometry. (b) Layout of the two-cylinder waveguide sensor. The THz wave passes through the subwavelength gap, g, where an intense interaction with the film occurs.

Image of FIG. 2.
FIG. 2.

Pulse delay added by introducing PE layers (, thick) into the THz beam, as shown in Fig. 1(a). The theoretical curve and the linear fit show a slightly different inclination. Within the measurement accuracy of the geometrical thickness a good agreement with the theoretical values is obtained. Inset: Same measurement for thin PET layers [, thick].

Image of FIG. 3.
FIG. 3.

Pulse delay caused by the two-cylinder waveguide sensor replacing the film sample of Fig. 1(a) in the THz beam. On one of the 63 mm diameter metal cylinders stepwise thick PET layers are attached. One series was recorded with the cylinders in contact (black dots) and another one with a gap (green circles). Theoretical curves are shown for comparison. The pulse delay for the layer on the sample cylinder is increased by a factor of 150 compared to the theoretical single-pass delay value, shown in Fig. 2.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor