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High aspect ratio nanochannel machining using single shot femtosecond Bessel beams
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10.1063/1.3479419
/content/aip/journal/apl/97/8/10.1063/1.3479419
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3479419
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Experimental setup. The curve shown below the sample illustrates the variation of the core intensity along the Bessel beam. Ablation occurs over a range between points A and B. (b) Representation of the conical energy flux toward the central core. (c) and (d) show terminated channels for energies of and , respectively.

Image of FIG. 2.
FIG. 2.

SEM image showing four machined channels with sample displacement differing by in the horizontal direction and vertically. The relative error in channel length due to cleaving is .

Image of FIG. 3.
FIG. 3.

Proof of principle machining of a through channel using Bessel beam conical half angle and a thick glass membrane at single shot pulse energy of .

Image of FIG. 4.
FIG. 4.

Dependence on pulse energy of (a) length and (b) mean diameter of machined nanochannel for two different conical half angles (squares) and (circles). Due to cleaving precision, the error bars are for channel length and ±50 nm for mean channel diameter.

Image of FIG. 5.
FIG. 5.

Profile of an array of channels drilled with identical energy per pulse and beam position such that channel length is and diameter 230 nm. The pitch is . White circles indicate channel positions. Inset shows postprocessed surface for an additional sample closer to threshold with pitch 800 nm. Scale bar is 200 nm.

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/content/aip/journal/apl/97/8/10.1063/1.3479419
2010-08-23
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: High aspect ratio nanochannel machining using single shot femtosecond Bessel beams
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3479419
10.1063/1.3479419
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