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The effect of graphite surface condition on the composition of by atomic layer deposition
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10.1063/1.3479908
/content/aip/journal/apl/97/8/10.1063/1.3479908
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3479908
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

XPS spectra for deposition on HOPG substrates at 30 and . (a) , (b) , and (c) regions are shown as raw spectral data, with (d) the region also shown as a difference spectrum referenced to the corresponding substrate peak prior to deposition.

Image of FIG. 2.
FIG. 2.

Normalized spectra [(a) and (d)], difference spectra [(b) and (e)], and and spectra [(c) and (f)] after 18 cycles ALD at [(a)–(c)] and [(d)–(f)] on annealed HOPG, exfoliated HOPG, and exfoliated . In [(a) and (d)], normalized spectra are vertically truncated to show detail.

Image of FIG. 3.
FIG. 3.

Postdeposition AFM images for [(a)–(c)] and [(b)–(f)] ALD temperature on exfoliated [(a) and (d)], [(b) and (e)], and [(c) and (f)] HOPG surfaces.

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/content/aip/journal/apl/97/8/10.1063/1.3479908
2010-08-24
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The effect of graphite surface condition on the composition of Al2O3 by atomic layer deposition
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3479908
10.1063/1.3479908
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