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(a) An example of the electrodes design: a 10 mm hole electrode, (b) a schematic of bulk plasma intrusion in the hole of the electrode.
A graph of the electron density vs the power of a krypton discharge at various electrode hole diameters and various pressures of (a) 64.5 mTorr, (b) 129 mTorr, and (c) 258 mTorr.
A graph of the hole diameter and the sheath length at 129 mTorr discharge. Among all the experiment conditions of the pressure, marked with gray circles on the graph, the hole diameters of the maximum plasma density discharge at fixed power are marked with x marks, marks, and triangle marks for each gas species of Ne, Ar, and Kr.
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