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Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma
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10.1063/1.3480409
/content/aip/journal/apl/97/8/10.1063/1.3480409
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3480409
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) An example of the electrodes design: a 10 mm hole electrode, (b) a schematic of bulk plasma intrusion in the hole of the electrode.

Image of FIG. 2.
FIG. 2.

A graph of the electron density vs the power of a krypton discharge at various electrode hole diameters and various pressures of (a) 64.5 mTorr, (b) 129 mTorr, and (c) 258 mTorr.

Image of FIG. 3.
FIG. 3.

A graph of the hole diameter and the sheath length at 129 mTorr discharge. Among all the experiment conditions of the pressure, marked with gray circles on the graph, the hole diameters of the maximum plasma density discharge at fixed power are marked with x marks, marks, and triangle marks for each gas species of Ne, Ar, and Kr.

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/content/aip/journal/apl/97/8/10.1063/1.3480409
2010-08-27
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effective design of multiple hollow cathode electrode to enhance the density of rf capacitively coupled plasma
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3480409
10.1063/1.3480409
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