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Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
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10.1063/1.3481361
/content/aip/journal/apl/97/8/10.1063/1.3481361
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3481361

Figures

Image of FIG. 1.
FIG. 1.

(a) Illustration of the cross-section of the thermally compensated Lamb wave resonator using IDT electrodes with a metalized (short-circuited) surface at the interface of the AlN/ composite stack. (b) SEM image of the thermally compensated Lamb wave resonator (design 3) on the AlN/ composite stack. The electrical contact via through the AlN layer is used to ground the Pt bottom electrode.

Image of FIG. 2.
FIG. 2.

The dispersive characteristics of the room temperature first-order TCF of Lamb wave resonators utilizing the lowest symmetric mode in the AlN/ composite stack with a metalized interface.

Image of FIG. 3.
FIG. 3.

Plot of the measured fractional frequency variation vs temperature of four Lamb wave resonators. Design 1 is an uncompensated resonator, whereas designs 2, 3, and 4 are well temperature-compensated resonators at , , and , respectively.

Tables

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Table I.

Geometric dimensions of Lamb wave resonators.

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Table II.

Comparison of simulated and measured TCF.

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Table III.

Performance of Lamb wave resonators after gold wire bonding at room temperature and turnover temperature.

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/content/aip/journal/apl/97/8/10.1063/1.3481361
2010-08-23
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications
http://aip.metastore.ingenta.com/content/aip/journal/apl/97/8/10.1063/1.3481361
10.1063/1.3481361
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