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(a) Illustration of the cross-section of the thermally compensated Lamb wave resonator using IDT electrodes with a metalized (short-circuited) surface at the interface of the AlN/ composite stack. (b) SEM image of the thermally compensated Lamb wave resonator (design 3) on the AlN/ composite stack. The electrical contact via through the AlN layer is used to ground the Pt bottom electrode.
The dispersive characteristics of the room temperature first-order TCF of Lamb wave resonators utilizing the lowest symmetric mode in the AlN/ composite stack with a metalized interface.
Plot of the measured fractional frequency variation vs temperature of four Lamb wave resonators. Design 1 is an uncompensated resonator, whereas designs 2, 3, and 4 are well temperature-compensated resonators at , , and , respectively.
Geometric dimensions of Lamb wave resonators.
Comparison of simulated and measured TCF.
Performance of Lamb wave resonators after gold wire bonding at room temperature and turnover temperature.
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