No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The effect of secondary electrons on the separate control of ion energy and flux in dual-frequency capacitively coupled radio frequency discharges
5.A. Bojarov, M. Radmilović-Radjenović, and Z. Lj. Petrović, Publ. Astron. Obs. Belgrade 84, 387 (2008).
17.Z. Donkó, in Proceedings of the Symposium of Application of Plasma Processes, edited by J. Matuska, S. Matejčik, and J. D. Skalny, Podbanske, Slovakia, January 20–25, 2007, IL02, pp. 21–24.
21.M. M. Turner, P. Chabert, P. Levif, P. Boyle, and J. Robiche, in Proceedings of the 18th ICPIG, edited by J. Schmidt, M. Šimek, S. Pekárek, and V. Prukner (Institute of Plasma Physics AS CR, Prague, 2007), p. G08.
22.R. Kollath, Encyclopedia of Physics, edited by S. Flügge (Springer, Berlin, 1956), Vol. XXI, p. 264.
24.T. Gans, J. Schulze, D. O’Connell, U. Czarnetzki, R. Faulkner, A. R. Ellingboe, and M. M. Turner, Appl. Phys. Lett. 89, 261502 (2006).
Article metrics loading...
Full text loading...
Most read this month