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XRD spectra for ZGZ laminates with and without RTA. The inset is the XPS spectra for ZGZ laminates with and without RTA.
C-V characteristics for MIM capacitors with different process conditions.
vs voltage for MIM capacitors with different process conditions where is the zero-biased capacitance and is the difference between C(V) and for fresh devices.
Impact of a La-doped capping layer on leakage current density for MIM capacitors with annealed ZGZ laminates measured at room temperature.
Dependence of on stress time for MIM capacitors with and without a La-doped capping layer measured at room temperature.
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