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Effects of chemical stoichiometry of channel region on bias instability in ZnO thin-film transistors
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10.1063/1.3557066
/content/aip/journal/apl/98/10/10.1063/1.3557066
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/10/10.1063/1.3557066
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

TDS spectra of (a) zinc and (b) oxygen from the ZnO films deposited under oxygen partial pressures of 0.33 and 0.75 Pa.

Image of FIG. 2.
FIG. 2.

(a) Transfer characteristics of the ZnO TFTs when the ZnO channels were deposited under oxygen partial pressure from 0.17 to 0.75 Pa. The inset is device structure, and (b) trap densities in the ZnO channel layers as a functions of the energy from the conduction band.

Image of FIG. 3.
FIG. 3.

Bias instability results for the TFT with O-rich ZnO. (a) The change in transfer characteristics under a gate bias stress of 20 V and a drain bias stress of 0 V. The change in linear mobility is also indicated with ○: initial, △: , ◻: , and ▽: , respectively, (b) the variation in from the initial value under various gate bias stresses without drain bias stress, and (c) the variation in from the initial value under various drain bias stresses without gate bias stress.

Image of FIG. 4.
FIG. 4.

Bias instability results for the TFT with Zn-rich ZnO. (a) The change in transfer characteristics under a gate bias stress of 20 V and a drain bias stress of 0 V. The change in linear mobility is also indicated with ○: initial, △: , ◻: , and ▽: , respectively, (b) the variation in from the initial value under various gate bias stresses without drain bias stress, and (c) the variation in from the initial value under various drain bias stresses without gate bias stress.

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/content/aip/journal/apl/98/10/10.1063/1.3557066
2011-03-10
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Effects of chemical stoichiometry of channel region on bias instability in ZnO thin-film transistors
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/10/10.1063/1.3557066
10.1063/1.3557066
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