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(a) Schematic cross-section of the MFS capacitor along with an equivalent circuit. (b) The saturated hysteresis loop of ferroelectric polarization as a function of the electric field.
Simulation example of (a) , (b) , and (c) in the MFS structure for different carrier concentrations .
Simulation example of (a) , (b) , and (c) in the MFIS structure for and . Results in the MFS structure are also shown for comparison.
curves of (a) the MFM capacitors and the MFS capacitors with the carrier concentration of (b) , (c) , and (d) in the semiconductor. As the carrier concentration increases in the MFS structure, the contribution of decreases in depletion making the shape of the curves similar to that of the MFM capacitor.
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