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(a) SEM micrograph of long, 340 nm thick, and wide silicon nitride strings. (b) SEM micrograph of , wide, and 30 nm thick Al strings.
The measured frequency shift per degree Celsius of silicon nitride strings of various lengths. The error bars are the standard deviation. The solid and dotted lines are linear fits to the points from the 177 nm and 340 nm thick strings, respectively.
Relative frequency shift of a long and 340 nm thick silicon nitride string and a aluminum string as a function of temperature. The resonance frequency at is 627 kHz and 202 kHz for the silicon nitride and aluminum strings, respectively. Hollow and solid symbols represent the measured values as the temperature was swept from to and to , respectively.
The resonance frequency, prestress, frequency shift per temperature change, and relative change in four different strings. The listed resonance frequencies are measured at .
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