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Chip-scale integrated tuning of photonic crystal two-cavity optical EIT system. (a) SEM of thermally tuned coupled cavities with thermal isolation trench and tuning electrodes. Scale bar: . (b) SEM of single cavity. Scale bar: 500 nm. (c) 2D FDTD simulated model profile (log scale) with outline of integrated electrode. (d) Schematics of alternative nanofabrication flow. (i) SOI wafer, (ii) electron-beam lithography defined electrodes, and (iii) suspended silicon membrane. Initial sacrificial release and defining electrodes.
Integrated tuning of the two-cavity resonances. (a) The resonant wavelength of the active cavity (solid squares) and the target cavity (empty circles) vs the tuning power. Inset: fine tuning cavity resonances in the cavity-cavity interference region. (b) Detuning vs local tuning power within the same region as inset of (a). Solid and empty squares are data measured at base temperature and , respectively. Lines are linear fits. (c) Example two-cavity coherent transmission under different local tuning powers (, 2.6, 2.9, and 4.0, with cavity tuning power at 3.59 mW, 3.46 mW, 3.39 mW, and 3.26 mW, respectively). Heavy (black) lines are experimental data and the light (red) lines are CMT fits. Curves are offset by −0.5 for clarity.
Transmission spectrum (a) measurement with fixed resonance tuning power and increasing phase tuning power to adjust the transmission lineshape from flat-top reflectors to EIT-like peak. (b) Simulation with fixed cavity resonances and increasing phase. Inset: optical image of nanofabricated resonance and phase tuning electrodes on photonic crystal membrane with thermal isolation trenches.
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