Full text loading...
(a) The ideal top view of surface construction for first type substrate and (b) the RHEED patterns of reconstructed surface at of (a). (c) The top view of surface reconstruction of second type substrate confirmed by RHEED patterns in (d).
Cross-sectional HRTEM images of ALD- films grown on the TMA-pretreated - and -surface samples. The images show the thicknesses of are around 6.4 nm and 6.6 nm, respectively.
Electrical characteristics of MOSCAPs. (a) Current density versus gate bias voltage and (b) multiple frequencies curves with hysteresis characteristics on - and -surface substrates.
XPS core-level spectra of subjected to - and -surface substrates with the inset showing no significant difference between the signals of these two kinds of orientations in spectra.
Article metrics loading...