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Measurement results of the ZnO thin film on silicon substrate using rf magnetron sputtering system. [(a) and (b)] FESEM, (c) AFM, (d) XRD, and (e) RBS.
Work function and TEM images of InSb thin layer (, , and ).
Fabrication of the Schottky diode and work function measurement in patterned InSb-deposited ZnO thin film with .
The J-V and I-V characteristics obtained from the ZnO Schottky diodes.
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