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Time-resolved gas temperature evolution in pulsed microwave discharge
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10.1063/1.3576928
/content/aip/journal/apl/98/14/10.1063/1.3576928
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/14/10.1063/1.3576928
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) time evolution at two different values of and at two contents. Pulse duration is , period is . rms error in saturation (at 1600 W) ≈80 K. (b) Rotational spectra (FPS of ) taken at three different delay times after the beginning of the plasma pulse. was determined using the P1/P2 peaks ratio by the empirical expression from Ref. 15 (, 15% of ).

Image of FIG. 2.
FIG. 2.

(a) time evolution at different pulse durations and at the constant time averaged power. Period is . (b) time evolution at different pulse durations and at . Duty .

Image of FIG. 3.
FIG. 3.

Time evolution of the of at two different values of the content. Pulse duration is , period is . . rms error in saturation is about 300 K.

Image of FIG. 4.
FIG. 4.

The normalized intensities of the Ar (750.4nm), (380.5nm), (391.5nm), and N (821.6 nm) emission lines during the plasma pulse. Pulse duration is , period is . .

Image of FIG. 5.
FIG. 5.

Gas temperature growth rate (TGR) at the beginning of a plasma pulse as a function of power . Inset: effective power ratio calculated based on the measured TGR and known gas heat capacity (21 J/mol/K).

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/content/aip/journal/apl/98/14/10.1063/1.3576928
2011-04-06
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Time-resolved gas temperature evolution in pulsed Ar–N2 microwave discharge
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/14/10.1063/1.3576928
10.1063/1.3576928
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