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Schematic of the PM-HDLT attached to the thrust balance. Also shown are the laser displacement sensor, thrust balance calibration system, rf antenna, and diagnostic probes.
Thrust as a function of effective rf power for an argon flow rate of (0.08 Pa). The open squares show the experimental measurements while the open circles show the thrust calculated from Eq. (1). The experimental error bars show an estimate of the uncertainty in the measurements based on the analysis of the data while the theoretical error bars result from the uncertainty in the electron temperature used in Eq. (1). The crosses show the upstream plasma density on axis at as a function of effective rf power.
IEDFs as a function of effective rf power taken with the RFEA located at . The open circles show the experimental IEDF for 725 W while the solid line shows the sum of the Gaussians (dashed lines) used in the deconvolution. The dotted-dashed and dotted lines represent the sum of the fitted Gaussians for effective powers of 140 W and 400 W, respectively.
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