1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
Rent:
Rent this article for
USD
10.1063/1.3580768
/content/aip/journal/apl/98/15/10.1063/1.3580768
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/15/10.1063/1.3580768
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) SEM image of an array of corrugated silicon nanopillars immediately after etching. These pillars were fabricated by oscillating the etching conditions to controllably undercut and overpassivate the silicon. (b) An array of nanopillars with vertical sidewalls etched using the same pseudo-Bosch recipe but without varying the ratio of etch to passivation gas.

Image of FIG. 2.
FIG. 2.

(a) Bright-field image of the head and first quantum dot of a corrugated pillar after oxidation. Inset shows a similar picture with diffraction contrast to highlight the crystalline nature of the remaining silicon nanocrystals. [(b) and (c)] These frames utilize diffraction contrast to highlight the remaining quantum dots in the legs of the corrugated pillars after self-terminating oxidation. Scale bars are 50 nm.

Image of FIG. 3.
FIG. 3.

PL spectra of three samples of etched and oxidized quantum dots with different initial corrugation diameters. The leftmost curve (centered at 600 nm) corresponds to pillars in frame (a), the middle curve (centered at 640 nm) corresponds to the pillars in frame (b), and the rightmost curve (centered at 810 nm) corresponds to the pillars in frame (c). The preoxidation size is 30 nm, 37 nm, and 45 nm for the (a) black, (b) blue, and (c) green samples, respectively. Note that the larger the preoxidation size of the corrugated pillars the longer the peak emission wavelength. Scale bars are 200 nm in each frame.

Loading

Article metrics loading...

/content/aip/journal/apl/98/15/10.1063/1.3580768
2011-04-14
2014-04-24
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Size tunable visible and near-infrared photoluminescence from vertically etched silicon quantum dots
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/15/10.1063/1.3580768
10.1063/1.3580768
SEARCH_EXPAND_ITEM