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Crystallized HfLaO embedded tetragonal for dynamic random access memory capacitor dielectrics
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10.1063/1.3583590
/content/aip/journal/apl/98/17/10.1063/1.3583590
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/17/10.1063/1.3583590
/content/aip/journal/apl/98/17/10.1063/1.3583590
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/content/aip/journal/apl/98/17/10.1063/1.3583590
2011-04-27
2014-07-28
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Crystallized HfLaO embedded tetragonal ZrO2 for dynamic random access memory capacitor dielectrics
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/17/10.1063/1.3583590
10.1063/1.3583590
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