1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Comparison between chemical vapor deposited and physical vapor deposited metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors
Rent:
Rent this article for
USD
10.1063/1.3584024
/content/aip/journal/apl/98/18/10.1063/1.3584024
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/18/10.1063/1.3584024

Figures

Image of FIG. 1.
FIG. 1.

(a) Transfer and (b) output electrical characteristics of PVD and CVD metal gate InGaAs nMOSFETs with a 10 nm dielectric layer. The inset in (a) is the SIMS profile for the fluorine content in the PVD and CVD gate stack.

Image of FIG. 2.
FIG. 2.

(a) Transfer and (b) output electrical characteristics of PVD and CVD metal gate InGaAs nMOSFETs with a 6.5 nm dielectric layer. The inset in (a) is the SIMS profile for the fluorine content in the PVD and CVD gate stack.

Image of FIG. 3.
FIG. 3.

Extracted effective mobility vs inversion charge density using split method for the InGaAs nMOSFETs with different gate stacks. The inset is the inversion characteristics for InGaAs nMOSFETs with different gate stacks measured at 1 MHz.

Tables

Generic image for table
Table I.

Summary of the transfer characteristics for devices with different gate stacks of different deposition schemes and oxide thickness.

Loading

Article metrics loading...

/content/aip/journal/apl/98/18/10.1063/1.3584024
2011-05-03
2014-04-25
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Comparison between chemical vapor deposited and physical vapor deposited WSi2 metal gate for InGaAs n-metal-oxide-semiconductor field-effect transistors
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/18/10.1063/1.3584024
10.1063/1.3584024
SEARCH_EXPAND_ITEM