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Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source
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10.1063/1.3589359
/content/aip/journal/apl/98/20/10.1063/1.3589359
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/20/10.1063/1.3589359

Figures

Image of FIG. 1.
FIG. 1.

Contours of the plasma electron density at the peak of the laser pulse for planar (top) and spherical target (bottom) for (a) 150 and (b) laser spot size plasma. The contour lines correspond to values of (a) 19.4–17.6 and (b) 19.8–18.4 in 0.1 increments.

Image of FIG. 2.
FIG. 2.

Simulations of the HVM (dashed lines) and metrology (solid lines) electron density (blue), electron temperature (black) and normalized laser absorption (red) along the laser axis at the peak of the laser pulse.

Image of FIG. 3.
FIG. 3.

Normalized experimental time-resolved HVM laser pulse (solid black), HVM EUV emission (dashed black), metrology laser pulse (solid red), and metrology in-band EUV emission (dashed red).

Image of FIG. 4.
FIG. 4.

Normalized time-integrated EUV emission images for a Sn LPP with spot size of (a) 150 and (b) . Also plotted are horizontal lines (black) corresponding to twice the width of the laser focal spot size.

Tables

Generic image for table
Table I.

CE and plasma scale lengths for difference focal spot size and target geometry combinations.

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/content/aip/journal/apl/98/20/10.1063/1.3589359
2011-05-18
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/20/10.1063/1.3589359
10.1063/1.3589359
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