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SEM images of a groove performed in silicon at 850 nm and filled with HSFL. (a) gives a view of the groove, (b) shows details of the HSFL, and (c) is the 2D-FT of image (b).
Evolution of the refractive index as a function of the carrier density at laser wavelengths of 700, 750, 800, 850, 900, and 950 nm.
Comparison of experimental data and the SHG theoretical model of HSFL spacing as a function of the wavelength. The experimental data clearly follows the model of fs laser excited silicon refractive indices .
Summary of optical and physical data as a function of the wavelength. : classical nonexcited refractive index of silicon, : linear absorption coefficient, : surface reflectivity, : carrier density under fs irradiation [calculated from Eq. (6)], and : modified refractive index of silicon as calculated by the Drude model [Eq. (5)].
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