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Calculated spectral response of the designed GMR polarizer for TE and TM polarizations. Inset shows a schematic of a resonance polarizer. Parameters: thickness ; refractive indices , , , ; grating period ; filling factor ; incident angle (normal incidence).
AFM image and profile of the fabricated Si grating structure. Cross-section image shows the grating period is 977 nm, width of the a-Si grating ridge is 249 nm, and thickness of the a-Si grating is 242 nm.
SEM images of the fabricated GMR polarizer. (a) Top-down view . Size of image is . (b) Cross-sectional view . SEM image shows the profile of the grating is rectangular.
Theoretical (dashed line) and experimental (solid dot) spectral response of fabricated GMR polarizer for both TE- and TM-polarized incident waves. Device parameters for theoretical calculation are extracted from AFM images. Experimental data is corrected for a reflection at the backside of the substrate.
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