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Surface damage on diamond membranes fabricated by ion implantation and lift-off
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10.1063/1.3597223
/content/aip/journal/apl/98/23/10.1063/1.3597223
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597223
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Spectra collected at a detector angle of 100° using 0.5 MeV of diamond implanted with 2 MeV and annealed to . Inset is a spatial map of the removed cap. Dark areas are well channeled, the lighter areas in an off-axis orientation.

Image of FIG. 2.
FIG. 2.

Comparison of regions A, B, and C for each sample with parameters varied as shown. The intrinsic surface peaks are shown to the right for comparison.

Image of FIG. 3.
FIG. 3.

(a) Weak beam dark field TEM image showing layers of crystalline material at diamond-graphite interfaces in a sample implanted with 0.5 MeV . (b) SRIM simulation of 0.5 MeV ion implanted to a fluence of with critical damage thresholds indicated.

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/content/aip/journal/apl/98/23/10.1063/1.3597223
2011-06-08
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Surface damage on diamond membranes fabricated by ion implantation and lift-off
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597223
10.1063/1.3597223
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