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Stacking faults created by the combined deflection of threading dislocations of Burgers vector c and during the physical vapor transport growth of 4H–SiC
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10.1063/1.3597226
/content/aip/journal/apl/98/23/10.1063/1.3597226
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597226

Figures

Image of FIG. 1.
FIG. 1.

[(a)–(c)] SWBXT Images recorded from a region near the edge of a 76 mm wafer cut with 4° offcut toward : (a) reflection showing stacking fault contrast from fault A only; (b) reflection showing strong fault contrast from fault B and weak fault contrast from fault A; (c) reflection showing absence of all fault contrast.

Image of FIG. 2.
FIG. 2.

(a) Schematic of macrostep overgrowth of the surface outcrop of a TSD with two -height surface spiral steps which has a CPAD with a -height spiral step protruding onto the terrace between the two -height steps; (b) creation of two Frank partial dislocations separating a Frank fault; (c) overgrowth of the outcrop of the threading CPAD, creating another Frank dislocation and two Shockley partials lying on the basal plane which are on slip planes separated by one unit cell; (d) glide of glissile Shockley under thermal stress leaving a Shockley fault in its wake, giving a net fault vector in this region of plus Shockley; (e) schematic of glide of dissociated basal plane dislocation above the BDTT wherein the two Shockleys move in tandem under stress, with the leading partial , for example, converting twinned tetrahedra in the middle column into untwinned (in the middle column, tetrahedra are drawn using dotted lines prior to glide and full lines after); (f) after further glide in, the trailing partial reverses this process; (g) if the two partials are on two parallel slip planes separated by a unit cell height, the leading partial is glissile and converts twinned tetrahedra into untwinned while the trailing partial is sessile because it encounters a terminating glide plane; (h) for the reverse sense of stress, the leading partial is glissile and converts twinned tetrahedra into untwinned while the trailing partial (which would normally convert untwinned tetrahedra into twinned) is sessile because the tetrahedra on its glide plane are already twinned. [(i)–(k)] Expansion of different faults from overgrowth of several CPADs with different -components (as indicated by the original CPAD Burgers vectors) which protruded onto the terrace between the two spiral steps.

Tables

Generic image for table
Table I.

values for stacking faults A and B.

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/content/aip/journal/apl/98/23/10.1063/1.3597226
2011-06-09
2014-04-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Stacking faults created by the combined deflection of threading dislocations of Burgers vector c and c+a during the physical vapor transport growth of 4H–SiC
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597226
10.1063/1.3597226
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