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Impact of carbon coimplantation on boron behavior in silicon: Carbon–boron coclustering and suppression of boron diffusion
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10.1063/1.3597303
/content/aip/journal/apl/98/23/10.1063/1.3597303
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597303
/content/aip/journal/apl/98/23/10.1063/1.3597303
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/content/aip/journal/apl/98/23/10.1063/1.3597303
2011-06-06
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Impact of carbon coimplantation on boron behavior in silicon: Carbon–boron coclustering and suppression of boron diffusion
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/23/10.1063/1.3597303
10.1063/1.3597303
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