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3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks
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10.1063/1.3603944
/content/aip/journal/apl/98/26/10.1063/1.3603944
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/26/10.1063/1.3603944
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Admittance (bottom) of the 3.4 GHz composite TFBAR. The insert shows the structure of the TFBAR, together with the stress amplitude of the trapped acoustic wave.

Image of FIG. 2.
FIG. 2.

Temperature drift of the resonance and antiresonance frequency.

Image of FIG. 3.
FIG. 3.

S21 scattering parameter measurements on resonators with resonance frequencies around 3.4 GHz (variation due to non-uniform film thickness).

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/content/aip/journal/apl/98/26/10.1063/1.3603944
2011-06-28
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: 3.4 GHz composite thin film bulk acoustic wave resonator for miniaturized atomic clocks
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/26/10.1063/1.3603944
10.1063/1.3603944
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