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Enhanced optical constants of nanocrystalline yttrium oxide thin films
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View: Figures


Image of FIG. 1.
FIG. 1.

XRD patterns of films grown on Si(100) substrates. The structural changes with increasing growth temperature are evident. Room temperature grown samples are amorphous, while those at higher temperatures are nanocrystalline. The randomly oriented cubic structure of is evident at .

Image of FIG. 2.
FIG. 2.

The spectral dependence of and for films. A significant shift of and with a change in nanostructure and grain-size of films is evident from the curves.

Image of FIG. 3.
FIG. 3.

The spectral dependence of for films as a function of growth conditions.

Image of FIG. 4.
FIG. 4.

The spectral dependence of the index of refraction of films as a function of growth conditions. A marked difference in the profiles is evident for nanocrystalline when compared to the amorphous . The curves demonstrate that the values are dependent on the grain-size. Enhancement in values for nanocrystalline is due to increased grain-size. The profile of bulk is shown for comparison. It is evident that the randomly oriented, cubic- nanocrystallites grown at exhibit the best profile that is comparable to that of bulk.


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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Enhanced optical constants of nanocrystalline yttrium oxide thin films