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Making a geometrically asymmetric capacitive rf discharge electrically symmetric
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10.1063/1.3544541
/content/aip/journal/apl/98/3/10.1063/1.3544541
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/3/10.1063/1.3544541
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Sketch of the discharge geometry including the rf current paths (arrows).

Image of FIG. 2.
FIG. 2.

Simulation: Ion flux energy distribution functions for different values of at the smaller powered electrode (red, top) and the larger grounded electrode (blue, bottom).

Image of FIG. 3.
FIG. 3.

dc self-bias [simulation: red line and dots, analytical model: Eq. (1), black line and triangles] and symmetry parameter (simulation: blue line and squares) as a function of .

Image of FIG. 4.
FIG. 4.

Simulation: Mean flux (top) and mean energy (bottom) of ions at the smaller powered electrode (red line and dots) and at the larger grounded electrode (blue line and squares).

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/content/aip/journal/apl/98/3/10.1063/1.3544541
2011-01-21
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Making a geometrically asymmetric capacitive rf discharge electrically symmetric
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/3/10.1063/1.3544541
10.1063/1.3544541
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