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Making a geometrically asymmetric capacitive rf discharge electrically symmetric
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10.1063/1.3544541
/content/aip/journal/apl/98/3/10.1063/1.3544541
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/3/10.1063/1.3544541
/content/aip/journal/apl/98/3/10.1063/1.3544541
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/content/aip/journal/apl/98/3/10.1063/1.3544541
2011-01-21
2014-11-23
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Making a geometrically asymmetric capacitive rf discharge electrically symmetric
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/3/10.1063/1.3544541
10.1063/1.3544541
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