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Sketch of the discharge geometry including the rf current paths (arrows).
Simulation: Ion flux energy distribution functions for different values of at the smaller powered electrode (red, top) and the larger grounded electrode (blue, bottom).
dc self-bias [simulation: red line and dots, analytical model: Eq. (1), black line and triangles] and symmetry parameter (simulation: blue line and squares) as a function of .
Simulation: Mean flux (top) and mean energy (bottom) of ions at the smaller powered electrode (red line and dots) and at the larger grounded electrode (blue line and squares).
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