No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
Dielectric charging in capacitive microelectromechanical system switches with silicon nitride
1.J. Wibbeler, G. Pfeifer, and M. Hietschold, Sens. Actuators, A A71, 74 (1998).
4.Z. Peng, X. B. Yuan, J. C. M. Hwang, D. Forehand, and C. L. Goldsmith, Proceedings of the 2006 Asia-Pacific Microwave Conference, December 2006 (unpublished), pp. 1535–1539.
9.J. R. Webster, C. W. Dyck, C. D. Nordquist, J. A. Felix, M. R. Shaneyfelt, J. R. Schwank, and J. C. Banks, Proceedings of the 43rd Annual International Reliability Physics Symposium, April 2005 (unpublished), pp. 330–336.
10.M. Lamhamdi, P. Pons, U. Zaghloul, L. Boudou, F. Coccetti, J. Guastavino, Y. Segui, G. Papaioannou, and R. Plana, Microelectron. Reliab. 48, 1248, (2008).
14.M. H. W. M. van Delden and P. J. van der Wel, Proceedings of the IEEE 41st Annual International Reliability Physics Symposium, Dallas, Texas, April 2003 (unpublished), pp. 293–297.
16.M. Carrada, A. Zerga, M. Amann, J. J. Grob, J. P. Stoquert, A. Slaoui, C. Bonafos, and S. Scham, Mater. Sci. Eng., B 147, 218 (2008).
20.Z. H. Cen, T. P. Chen, L. Ding, Y. Liu, J. I. Wong, M. Yang, Z. Liu, W. P. Goh, Z. H. F. R. Zhu, and S. Fung, J. Appl. Phys. 105, 123101 (2009).
21.J. Vandershueren and J. Casiot, in Topics in Applied Physics: Thermally Stimulated Relaxation in Solids, edited by P. Braunlich (Springer-Verlag, Berlin, Germany, 1979), Vol. 37, Chap. 4.
25.G. Papaioannou, N. Tavassolian, C. L. Goldsmith, and J. Papapolymerou, Proceedings of the IEEE European Microwave Integrated Circuits Conference, September 2009 (unpublished), pp. 399–402.
Article metrics loading...
Full text loading...
Most read this month