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Atomic-resolution scanning transmission electron microscopy through 50-nm-thick silicon nitride membranes
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10.1063/1.3561758
/content/aip/journal/apl/98/9/10.1063/1.3561758
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/9/10.1063/1.3561758
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

Schematic representation of STEM of gold nanoparticles on the top and at the bottom of a SiN membrane of thickness . The electron beam direction is downward.

Image of FIG. 2.
FIG. 2.

Aberration corrected STEM of gold nanoparticles on a 50-nm-thick SiN membrane. (a) Image of gold nanoparticles on the top of the SiN membrane. (b) FFT of the image in (a). (c) Magnified image of the area selected by the rectangle in (a) showing single atoms; examples are indicated by the arrows. (d) Image of gold nanoparticles at the bottom of the SiN membrane. (e) FFT of image (d). (f) Selection (rectangle) from (d).

Image of FIG. 3.
FIG. 3.

The effect of beam broadening. (a) STEM image of gold nanoparticles on top of a 100-nm-thick SiN membrane. The FFT is shown in the inset. (b) Image recorded at the bottom of the SiN membrane in (a), with the FFT shown in the inset. (c) Magnified image of the area selected by the rectangle in (a) showing four single atoms indicated by the arrows. (d) Monte Carlo simulations of gold nanoparticles with diameters of 0.3, 0.4, 0.5, and 0.6 nm placed in a matrix at the bottom of a SiN membrane of 50 nm. (e) Same as in (d), but then for a membrane thickness of 100 nm.

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/content/aip/journal/apl/98/9/10.1063/1.3561758
2011-03-02
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Atomic-resolution scanning transmission electron microscopy through 50-nm-thick silicon nitride membranes
http://aip.metastore.ingenta.com/content/aip/journal/apl/98/9/10.1063/1.3561758
10.1063/1.3561758
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