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Determination of long time discharge current in microelectromechanical system capacitive switches
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10.1063/1.3636405
/content/aip/journal/apl/99/10/10.1063/1.3636405
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/10/10.1063/1.3636405
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Shift of pull-up state capacitance-voltage characteristic vs time after stress of a device stressed for 5 min at 40 V.

Image of FIG. 2.
FIG. 2.

(Color online) Bias for capacitance minimum (Vm) transient for a device stressed for 5 min at 40 V for the (o) sample annealed to remove humidity and (Δ) the not annealed sample.

Image of FIG. 3.
FIG. 3.

(Color online) Calculated discharge current density and corresponding current vs time for a device stressed at 40 V for 5 min for the (o) sample annealed to remove humidity and (Δ) the not annealed sample.

Image of FIG. 4.
FIG. 4.

(Color online) Dependence of fitting accuracy on the values of parameters τ and β. The fittings are performed by increasing the fitting value of time constant τ by 5% or decreasing the fitting value of stretch factor β by 5%, with respect to these obtained from Fig. 3. The inset shows the percentage deviations of resulting fittings from original one.

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/content/aip/journal/apl/99/10/10.1063/1.3636405
2011-09-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Determination of long time discharge current in microelectromechanical system capacitive switches
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/10/10.1063/1.3636405
10.1063/1.3636405
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