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Phosphorus ion implantation and annealing induced n-type conductivity and microstructure evolution in ultrananocrystalline diamond films
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10.1063/1.3641458
/content/aip/journal/apl/99/13/10.1063/1.3641458
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3641458
/content/aip/journal/apl/99/13/10.1063/1.3641458
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/content/aip/journal/apl/99/13/10.1063/1.3641458
2011-09-26
2014-08-01
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Phosphorus ion implantation and annealing induced n-type conductivity and microstructure evolution in ultrananocrystalline diamond films
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3641458
10.1063/1.3641458
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