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The curious case of thin-body Ge crystallization
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10.1063/1.3643160
/content/aip/journal/apl/99/13/10.1063/1.3643160
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3643160
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematics and XTEM images of wide fins (a) and (b) and of narrow fins (c) and (d). The 7° P implant serves to amorphize the top 120 nm of the wide fins, as well as partly amorphizing the sidewall. The narrow fins (35 nm wide and thinner) are completely amorphized. Fin height is approximately 435 nm.

Image of FIG. 2.
FIG. 2.

(Color online) XTEM images of a wide fin after a recrystallization anneal of 400 °C 3 min in N2. (a) There are facet defects at the base of the structure, (b) while the top section shows a few small defects and {111} stacking faults.

Image of FIG. 3.
FIG. 3.

(Color online) XTEM images of narrow fins after a recrystallization anneal of 400 °C 3 min in N2. (a) Fins have not completely crystallized, (b) in the crystalline Ge region some small defects have survived this anneal, in the amorphous Ge region some small crystallites are present, and (c) an arrowhead-shaped crystallization front accompanied by {111} defects are seen at the foot of the fins.

Image of FIG. 4.
FIG. 4.

(Color online) XTEM images of narrow fins after a recrystallization anneal of 600 °C 1 s RTA in N2. (a) Fins have completely crystallized with defects only located in the top of the structures. Defects at the foot and middle of the fins have been cured. (b) {111} defects have detached from sidewall, and (c) some sets of stacking faults have ordered themselves in a periodic arrangement forming a different polytype structure.

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/content/aip/journal/apl/99/13/10.1063/1.3643160
2011-09-29
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: The curious case of thin-body Ge crystallization
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3643160
10.1063/1.3643160
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