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Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering
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10.1063/1.3644396
/content/aip/journal/apl/99/13/10.1063/1.3644396
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3644396
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic of the high-resolution element-specific x-ray ptychography. Scanning series of coherent diffraction patterns are collected at the two energies below the absorption edge of a specific element. The phase map of the sample is directly reconstructed using the ptychographic iterative engine. The difference in the two images represents the spatial distribution of the target element. In this study, Au/Ag nanoparticles were used as the sample. Two energies below the Au L 3 absorption edge were selected to identify the Au element of the nanoparticles. X-rays were highly focused using KB mirrors to collect diffraction data with a high S/N ratio.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Phase map of the Au/Ag nanoparticles reconstructed from the diffraction patterns at 11.7 keV. The pixel size is 8.4 nm. The total pixel size is 635 × 635. (b) FE-SEM image of the same area as the image of (a).

Image of FIG. 3.
FIG. 3.

(Color online) Reconstructed phase maps of the Au/Ag nanoparticles at (a) 11.7 keV and (b) 11.91 keV. The pixel size is 8.4 nm. The total pixel size is 300 × 300. The same area is indicated by the square shown in Fig. 2(a). (c) Difference image of the phase maps at 11.7 and 11.91 keV. (d) Cross sections through the white lines in (a)-(c).

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/content/aip/journal/apl/99/13/10.1063/1.3644396
2011-09-28
2014-04-16
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Multiscale element mapping of buried structures by ptychographic x-ray diffraction microscopy using anomalous scattering
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/13/10.1063/1.3644396
10.1063/1.3644396
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