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Anomalous resonant frequency changes in piezoelectric microcantilevers by monolayer formation of Au films
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10.1063/1.3621825
/content/aip/journal/apl/99/14/10.1063/1.3621825
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/14/10.1063/1.3621825

Figures

Image of FIG. 1.
FIG. 1.

The scanning electron microscope (SEM) image of piezoelectric microcantilever array.

Image of FIG. 2.
FIG. 2.

(Color online) The linear plot of versus with three different cantilever sizes.

Image of FIG. 3.
FIG. 3.

(Color online) (a) The electrical harmonic responses at different mass loadings and (b) the experimental and theoretical resonant frequency shifts with Au mass loading. The cantilever dimensions were 100 × 300 μm.

Tables

Generic image for table
Table I.

The data showing the theoretical and measured resonant frequency, the spring constant, the effective cantilever mass, and the theoretical and measured frequency change at different Au thicknesses.

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/content/aip/journal/apl/99/14/10.1063/1.3621825
2011-10-03
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Anomalous resonant frequency changes in piezoelectric microcantilevers by monolayer formation of Au films
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/14/10.1063/1.3621825
10.1063/1.3621825
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