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The scanning electron microscope (SEM) image of piezoelectric microcantilever array.
(Color online) The linear plot of versus with three different cantilever sizes.
(Color online) (a) The electrical harmonic responses at different mass loadings and (b) the experimental and theoretical resonant frequency shifts with Au mass loading. The cantilever dimensions were 100 × 300 μm.
The data showing the theoretical and measured resonant frequency, the spring constant, the effective cantilever mass, and the theoretical and measured frequency change at different Au thicknesses.
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