1887
banner image
No data available.
Please log in to see this content.
You have no subscription access to this content.
No metrics data to plot.
The attempt to load metrics for this article has failed.
The attempt to plot a graph for these metrics has failed.
The full text of this article is not currently available.
Subwavelength lithography by waveguide mode interference
Rent:
Rent this article for
USD
10.1063/1.3651274
/content/aip/journal/apl/99/15/10.1063/1.3651274
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/15/10.1063/1.3651274
/content/aip/journal/apl/99/15/10.1063/1.3651274
Loading

Data & Media loading...

Loading

Article metrics loading...

/content/aip/journal/apl/99/15/10.1063/1.3651274
2011-10-11
2014-11-23
Loading

Full text loading...

This is a required field
Please enter a valid email address
752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Subwavelength lithography by waveguide mode interference
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/15/10.1063/1.3651274
10.1063/1.3651274
SEARCH_EXPAND_ITEM