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High speed and high density organic electrochemical transistor arrays
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A generic lithographic process is presented that allows the fabrication of high density organic electrochemical transistor arrays meant to interface with aqueous electrolytes. The channels of the transistors, which were 6 μm long, were made of the conducting polymer poly(3,4-ethylenedioxythiophene) doped with poly(styrene sulfonate) and were in direct contact with phosphate buffered saline. Source and drain electrodes and interconnects were insulated by parylene C, a biocompatible material. The transistors operated at low voltages and showed a response time of the order of 100 μs.
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