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Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit
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10.1063/1.3658873
/content/aip/journal/apl/99/19/10.1063/1.3658873
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/19/10.1063/1.3658873
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic of the basic experimental configuration for two-photon frequency-variation mapping.

Image of FIG. 2.
FIG. 2.

(Color online) (a) Confocal LSM image of the 500-MHz ring oscillator circuit at 100× magnification alongside (b) a 1064 nm single-photon,12 and (c) a 1560 nm two-photon frequency-variation image of the same feature under the same magnification. The z-axis in (b) and (c) represents the magnitude of laser-induced stage-delay variation from the monitored 15.625-MHz reference frequency using the 8-GHz RF spectrum analyzer. The maximum stage-delay for both techniques was ∼1 ps.

Image of FIG. 3.
FIG. 3.

(Color online) (a) Digitally magnified (350×) and cropped version of Fig. 2(c) alongside (b) and (c) SIL-enhanced contrast controlled two-photon frequency-variation images of the 500-MHz ring oscillator circuit taken at 1024 × 1024 scan resolution. The CAD overlay in (c) clearly demonstrates electrical-to-physical registration accuracy. (d) A calibrated vertical linescan trace across the initial 7 PMOS inverters (left-most squared CAD areas) captured in (c). (e) 260 nm signal injection resolution profile plot taken from (d).

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/content/aip/journal/apl/99/19/10.1063/1.3658873
2011-11-07
2014-04-25
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Solid-immersion-lens-enhanced nonlinear frequency-variation mapping of a silicon integrated-circuit
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/19/10.1063/1.3658873
10.1063/1.3658873
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