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Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current
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10.1063/1.3610571
/content/aip/journal/apl/99/2/10.1063/1.3610571
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/2/10.1063/1.3610571
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) Schematic of the fabrication steps of SGS. (a)-1. A 6-in. wafer-scale CVD grown FLG film is transferred onto a 100 nm-SiO2/Si substrate using thermal release tape. (a)-2. FLG beam is defined using photolithography and O2 plasma. (a)-3. Top electrode is formed by Cr/Au deposition and lift-off. (a)-4. FLG beam is suspended by selectively removing SiO2 using diluted HF, and the height of the air-gap is controlled by successively etching the Si substrate using diluted KOH solution. (b) Raman spectroscopy of CVD grown FLG transferred onto 100 nm-SiO2. (c) Bird’s eye-view SEM image of SGS (l/w ∼ 20 μm/2 μm, h ∼ 0.15 μm). (d) Tilted-view SEM image of SGS (l/w ∼ 20 μm/5 μm, h ∼ 2 μm).

Image of FIG. 2.
FIG. 2.

(Color online) I-V characteristics of SGS. The average VPI of SGS (l/w ∼ 20 μm/2 μm, h ∼ 0.15 μm) is 1.85 V. To prevent in-use stiction caused by Joule heating, a current compliance was set at 1 nA.

Image of FIG. 3.
FIG. 3.

(Color online) I-V characteristics of SGS for different beam length. (Inset shows VPI dependence on FLG beam length.)

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/content/aip/journal/apl/99/2/10.1063/1.3610571
2011-07-13
2014-04-17
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Suspended few-layer graphene beam electromechanical switch with abrupt on-off characteristics and minimal leakage current
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/2/10.1063/1.3610571
10.1063/1.3610571
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