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Fully integrable magnetic field sensor based on delta-E effect
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10.1063/1.3664135
/content/aip/journal/apl/99/22/10.1063/1.3664135
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/22/10.1063/1.3664135
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Experimental setup comprising a FeCoSiB-coated tipless cantilever placed in a commercial AFM unit. The oscillation is read out via the LASER deflection method. (b) SEM image of tipless Si-cantilever coated with 500 nm FeCoSiB.

Image of FIG. 2.
FIG. 2.

rms of the modulation of the oscillation amplitude with respect to an AC magnetic field (). Inset: modulated amplitude of the cantilever oscillation without external field and with , respectively. A biasing magnetic DC-field is applied during the measurement.

Image of FIG. 3.
FIG. 3.

Fourier transforms of the modulated amplitude with magnetic test fields of and .

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/content/aip/journal/apl/99/22/10.1063/1.3664135
2011-11-28
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Fully integrable magnetic field sensor based on delta-E effect
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/22/10.1063/1.3664135
10.1063/1.3664135
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