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(Color online) Schematic sample structure and EFM analysis method: (a) charge injection with contact mode and (b) CPDs measurement.
(Color online) The measured CPDs profiles after injection of electrons (a) and holes (b). The integrated charge densities of electrons and holes from CPDs (c) and the calculated electron densities of samples (d).
(Color online) Cross section HRTEM image of samples with various charge trapping structures of 7 nm HfO2 layer (H1 and H2), 7 nm Al2O3 layer (A1 and A2), and 2 nm/7 nm Al2O3/HfO2 bi-layers (B1 and B2). The insets exhibit FFT analyses of selected areas.
(Color online) Electron densities extracted from the CPDs of various samples versus elapsed time.
Extracted diffusion coefficients for different samples.
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