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(Color online) A schematic cross section of beveled oxide samples, showing the “SAM” sample and the bare reference sample (not to scale).
(Color online) (a) Flat band voltage vs. oxide thickness relations of the SAM and bare reference before and after anneal; (b) Summary of the effective work function values extracted from (a).
(Color online) Comparison of the Si 2p spectra of SAM and bare samples with a thin (∼4 nm) Al layer. The intensities were adjusted so that the Si-O peaks are vertically similar for clarity. Inset shows a comparison of the SAM spectra from a thin Al sample to that acquired from the SiO2 beneath a delaminated capacitor.
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