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θ-2θ x-ray diffraction pattern from a ScN film deposited onto an Al2O3(0001) substrate. The inset shows a φ-scan plot of (solid line) the ScN 200 plane and (dot line) the Al2O3 plane.
Cross-sectional TEM micrographs of a ScN film on Al2O3(0001) substrate in (a) overview and (b) high resolution of the film/substrate interface, and (c) high-resolution of a region in the bulk of the film.
(Color online) Thermoelectric properties of a ScN film was measured from room temperature to 800 K, (a) Seebeck coefficient (left) and electrical resistivity (right) as functions of temperature, and (b) power factor S2/ρ vs. temperature from 300 to 800 K for three measured cycles.
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