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Influence of lattice parameters on the dielectric constant of tetragonal ZrO2 and La-doped ZrO2 crystals in thin films deposited by atomic layer deposition on Ge(001)
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10.1063/1.3666237
/content/aip/journal/apl/99/23/10.1063/1.3666237
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/23/10.1063/1.3666237
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Figures

Image of FIG. 1.
FIG. 1.

(a) SR-XRD analysis around the position of the t(102) peak in wide and grazing exit geometry, and (b) Bragg Brentano analysis of the t(101) reflection, of La-ZrO2 (black) and ZrO2 (grey) thin films. Powder diffraction patterns of cubic, tetragonal, and monoclinic ZrO2 are also added for comparison.

Image of FIG. 2.
FIG. 2.

(Color online) Distribution of the calculated k values as a function of the lattice parameters of tetragonal ZrO2. The experimentally measured lattice parameters of ZrO2 (squares) and La-ZrO2 (diamonds) are also reported, together with those of nanosized and high temperature tetragonal ZrO2 phases reported in database (asterisks).

Image of FIG. 3.
FIG. 3.

(Color online) (a) C-V characteristics at 1 kHz of ZrO2 (full symbols) and La-ZrO2 (open symbols) stacks on Ge (b):ToF SIMS depth profiles of as deposited (full symbols) and 400 °C annealed (open symbols) La-ZrO2 and ZrO2 stacks on Ge. In La-ZrO2: Ge: ♦, ZrO2:▾, LaO: ◂. In ZrO2: Ge: •, ZrO2: ▴, LaO: ▸.

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/content/aip/journal/apl/99/23/10.1063/1.3666237
2011-12-07
2014-04-21
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of lattice parameters on the dielectric constant of tetragonal ZrO2 and La-doped ZrO2 crystals in thin films deposited by atomic layer deposition on Ge(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/23/10.1063/1.3666237
10.1063/1.3666237
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