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Influence of lattice parameters on the dielectric constant of tetragonal ZrO2 and La-doped ZrO2 crystals in thin films deposited by atomic layer deposition on Ge(001)
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10.1063/1.3666237
/content/aip/journal/apl/99/23/10.1063/1.3666237
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/23/10.1063/1.3666237
/content/aip/journal/apl/99/23/10.1063/1.3666237
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/content/aip/journal/apl/99/23/10.1063/1.3666237
2011-12-07
2014-10-26
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Influence of lattice parameters on the dielectric constant of tetragonal ZrO2 and La-doped ZrO2 crystals in thin films deposited by atomic layer deposition on Ge(001)
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/23/10.1063/1.3666237
10.1063/1.3666237
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