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(Color online) (a) Scanning electron microscope (SEM) and (b) AFM micrographs of a monolayer of carboxylated multi-wall carbon nanotubes attached to an APTES-functionalized PEDOT:PSS thin film.
Schematic diagram (longitudinal cross section) of the micro-fabrication process of PEDOT:PSS/CNT/PMMA (CNT1) bridges.
(Color online) SEM micrograph of a CNT1 bridge with a ∼1.3 μm air gap height (d), a length of 57 μm (L), a width of 10 μm (w), and a thickness of 520 nm.
Characteristic electrostatically actuated and optically detected fundamental flexural resonance peak shapes of PEDOT:PSS/PMMA (PEDOT) and (PEDOT:PSS/CNT) × 2/PMMA (CNT2) bridges.
Flexural resonance f res measured at 10−6 Torr as a function of L for the pMEMS multilayer structures: PEDOT (•), CNT1 (★) and CNT2 (♦). Solid lines represent simulated f res values considering axial stress-free bridges (f res ∝1/L 2). Dashed lines represent simulated f res values including axial stress, σ 0, of 1 MPa for PEDOT and 20 MPa for CNT1 and CNT2 bridges.
Mean quality factor, Q, as a function of L for polymer bridges with different multilayer structures. The error bars correspond to the standard deviation. Also shown are the maximum and minimum values of Q obtained for a given L.
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