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Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material
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10.1063/1.3621861
/content/aip/journal/apl/99/4/10.1063/1.3621861
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/4/10.1063/1.3621861
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Figures

Image of FIG. 1.
FIG. 1.

(Color online) (a) Scanning electron microscope (SEM) and (b) AFM micrographs of a monolayer of carboxylated multi-wall carbon nanotubes attached to an APTES-functionalized PEDOT:PSS thin film.

Image of FIG. 2.
FIG. 2.

Schematic diagram (longitudinal cross section) of the micro-fabrication process of PEDOT:PSS/CNT/PMMA (CNT1) bridges.

Image of FIG. 3.
FIG. 3.

(Color online) SEM micrograph of a CNT1 bridge with a ∼1.3 μm air gap height (d), a length of 57 μm (L), a width of 10 μm (w), and a thickness of 520 nm.

Image of FIG. 4.
FIG. 4.

Characteristic electrostatically actuated and optically detected fundamental flexural resonance peak shapes of PEDOT:PSS/PMMA (PEDOT) and (PEDOT:PSS/CNT) × 2/PMMA (CNT2) bridges.

Image of FIG. 5.
FIG. 5.

Flexural resonance f res measured at 10−6 Torr as a function of L for the pMEMS multilayer structures: PEDOT (•), CNT1 (★) and CNT2 (♦). Solid lines represent simulated f res values considering axial stress-free bridges (f res ∝1/L 2). Dashed lines represent simulated f res values including axial stress, σ 0, of 1 MPa for PEDOT and 20 MPa for CNT1 and CNT2 bridges.

Image of FIG. 6.
FIG. 6.

Mean quality factor, Q, as a function of L for polymer bridges with different multilayer structures. The error bars correspond to the standard deviation. Also shown are the maximum and minimum values of Q obtained for a given L.

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/content/aip/journal/apl/99/4/10.1063/1.3621861
2011-07-29
2014-04-24
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Microelectromechanical resonators based on an all polymer/carbon nanotube composite structural material
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/4/10.1063/1.3621861
10.1063/1.3621861
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