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(Color online) (a) Schematic of DPLR technique. (b) A typical AZO film processed by DPLR. (c) Temperature evolution of AZO film and SLG carried out by multiphysics EM-HT simulation. (see Ref. 15).
(Color online) Morphology of AZO films obtained from (a) PLD, (b) DPLR; (c) Histogram of AZO size distribution.
(Color online) Transmittance and absorptance spectra of AZO films processed by R.T. PLD (dashed-dot) and DPLR under three different conditions.
Electrical properties of AZO films deposited in this study vs. at prior literatures at RT or elevated temperatures.
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