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Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism
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10.1063/1.3624830
/content/aip/journal/apl/99/7/10.1063/1.3624830
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/7/10.1063/1.3624830
View: Figures

Figures

Image of FIG. 1.
FIG. 1.

(a) Picture and cross-section of the device and (b) the unipolar capacitance-voltage and current-voltage characteristics of the MEMS switch.

Image of FIG. 2.
FIG. 2.

(Color online) Current-voltage characteristic of the MEMS switch. The inset shows the excellent agreement with Pool-Frenkel effect.

Image of FIG. 3.
FIG. 3.

Dependence of Poole-Frenkel current and corresponding Fowler-Nordheim electric field intensity on the applied bias to device terminals.

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/content/aip/journal/apl/99/7/10.1063/1.3624830
2011-08-15
2014-04-18
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: Floating electrode microelectromechanical system capacitive switches: A different actuation mechanism
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/7/10.1063/1.3624830
10.1063/1.3624830
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