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A hybrid surface passivation on HgCdTe long wave infrared detector with in-situ CdTe deposition and high-density hydrogen plasma modification
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10.1063/1.3633103
/content/aip/journal/apl/99/9/10.1063/1.3633103
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/9/10.1063/1.3633103

Figures

Image of FIG. 1.
FIG. 1.

(Color online) Process flow chart of hybrid surface passivation for n+-on-p HgCdTe long wave detector arrays. (a) covering the thin layer of CdTe dielectric film on rinsed HgCdTe epitaxial film; (b) defining the implantation-window patterns with photolithography and exposing HgCdTe surface as implantation-window patterns after selectively etching CdTe film; (c) depositing ZnS film as implantation barrier layers and implanting B+ into implantation-window patterns to form n+-on-p photodiode arrays; (d) low energy hydrogen plasma modification of photodiodes; (e) removing the barrier layer and photoresist and depositing ZnS film to cover the surface of photodetector arrays to form double-layer passivation, then exposing HgCdTe surface as metallization patterns with selective etching ZnS film and depositing the metallization electrode; (f) fabricated three type surface-passivated pixels in one same chip.

Image of FIG. 2.
FIG. 2.

(Color online) Measured dynamic resistance (right axis) and dark current (left axis) with different surface passivation techniques.

Image of FIG. 3.
FIG. 3.

(Color online) Measured R-V curves and fitted trap-assisted current components for the conventional technique and in-situ CdTe passivation. The data with hybrid surface passivation are not list in the figure for better view of extracted current components. R exp(dotted) is the experimental data of total dynamic resistance, R fit(dotted) is the fitting data of total dynamic resistance, and R tat(triangular) is the dynamic resistance of trap assisted tunneling current.

Tables

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Table I.

Extracted characteristic parameters corresponding to trap-assisted current components by using developed simultaneous current extracting approach.

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/content/aip/journal/apl/99/9/10.1063/1.3633103
2011-08-29
2014-04-20
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752b84549af89a08dbdd7fdb8b9568b5 journal.articlezxybnytfddd
Scitation: A hybrid surface passivation on HgCdTe long wave infrared detector with in-situ CdTe deposition and high-density hydrogen plasma modification
http://aip.metastore.ingenta.com/content/aip/journal/apl/99/9/10.1063/1.3633103
10.1063/1.3633103
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