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1.
1. E. H. Snow, A. S. Grove, B. E. Deal, and C. T. Sah, J. Appl. Phys. 36, 1664 (1965).
http://dx.doi.org/10.1063/1.1703105
2.
2. E. Yon, W. H. Ko, and A. B. Kuper, IEEE Trans. Electron Devices ED-13, 276 (1966).
http://dx.doi.org/10.1109/T-ED.1966.15680
3.
3. C. M. Osburn and D. W. Ormond, J. Electrochem. Soc. 121, 1195 (1974).
http://dx.doi.org/10.1149/1.2402011
4.
4. J. P. Stagg, Appl. Phys. Lett. 31, 532 (1977).
http://dx.doi.org/10.1063/1.89766
5.
5. G. Greeuw and J. F. Verwey, J. Appl. Phys. 56, 2218 (1984).
http://dx.doi.org/10.1063/1.334256
6.
6. F. Kawamura, H. Yamane, T. Yamada, S. Yin, and T. Sato, J. Ceram. Soc. Jpn. 115, 74 (2007).
http://dx.doi.org/10.2109/jcersj.115.74
7.
7. I. Constant, F. Tardif, and J. Derrien, Semicond. Sci. Technol. 15, 61 (2000).
http://dx.doi.org/10.1088/0268-1242/15/1/311
8.
8. T. Ferrus, R. George, C. H. W. Barnes, N. Lumpin, D. J. Paul, and M. Peppar, J. Phys.: Condens. Matter 19, 226216 (2007).
http://dx.doi.org/10.1088/0953-8984/19/22/226216
9.
9. B. R. Tuttle, S. Dhar, S.-H. Ryu, X. Zhu, J. R. Williams, L. C. Feldman, and S. T. Pantelides, J. Appl. Phys. 109, 023702 (2011).
http://dx.doi.org/10.1063/1.3533767
10.
10. P. G. Hermannsson and E. Ö. Sveinbjörnsson, Phys. Scr. T148, 014004 (2012).
http://dx.doi.org/10.1088/0031-8949/2012/T148/014004
11.
11. M. K. Linnarsson and A. Hallén, Mat. Sci. Forum 778, 297 (2014).
http://dx.doi.org/10.4028/www.scientific.net/MSF.778-780.297
12.
12. N. Achtziger, J. Grillenberger, W. Witthuhn, M. K. Linnarsson, M. Janson, and B. G. Svensson, Appl. Phys. Lett. 73, 945 (1998).
http://dx.doi.org/10.1063/1.122047
13.
13. T. R. Waite, J. Chem. Phys. 28, 103 (1958).
http://dx.doi.org/10.1063/1.1744051
14.
14. M. S. Janson, M. K. Linnarsson, A. Hallén, B. G. Svensson, N. Achtziger, L. Unéus, A. Lloyd-Spetz, and U. Forsberg, Phys. Scr. T108, 99 (2004).
http://dx.doi.org/10.1238/Physica.Topical.108a00099
15.
15. M. K. Linnarsson, M. S. Janson, S. Karlsson, A. Schöner, N. Nordell, and B. G. Svensson, Mater. Sci. Eng. B 61-62, 275 (1999).
http://dx.doi.org/10.1016/S0921-5107(98)00517-0
16.
16. R. D. Shannon, Acta Cryst. A32, 751 (1976).
http://dx.doi.org/10.1107/S0567739476001551
17.
17. N. T. Son, X. T. Trinh, L. S. Lövlie, B. G. Svensson, K. Kawahara, J. Suda, T. Kimoto, T. Umeda, J. Isoya, T. Makino, T. Ohshima, and E. Janzén, Phys. Rev. Lett. 109, 187603 (2012).
http://dx.doi.org/10.1103/PhysRevLett.109.187603
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/content/aip/journal/aplmater/2/9/10.1063/1.4895040
2014-09-04
2016-12-04

Abstract

Sodium diffusion has been studied in p-type 4H-SiC. Heat treatments have been performed from 1200 °C to 1800 °C for 1 min to 4 h. Secondary ion mass spectrometry has been used to measure the sodium distribution. We show that sodium has a considerable mobility at 1200 °C in p-type 4H-SiC. On the other hand for sodium atoms trapped at suitable sites the mobility is limited up to 1800 °C. Trap limited diffusion kinetics is suggested and an effective diffusivity has been extracted with an activation energy of 4 eV for sodium diffusion in p-type 4H-SiC.

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